WEBOct 1, 2018 · The planarized spin - on glass (SOG) - forms next to the first silicon oxide layer. The high selectivity of etching is crucial to remove the previous etching step and protect the metal from etching. In our work, the suction is applied to a glass layer and the CVD (silicon oxide barrier layer) is slowly etched.
WEBSpin On Glass | Stanford Nanofabrication Facility. Preferred Short Name: SOG. Chemical Formula: Various SOGs. Spin On Glass (SOG) is made up of Silicon Oxides suspended in solvents. Formulations can also include doping materials. SOGs are deposited using a spin coater. PROM requests. Request to use SOG in SNF.
WEBThe 'spin- on-glass' films can be applied as sources of dopants for diffusion processes, and also as catalytic, sensor, dielectric, pro- tective, masking coatings or as getters or planarizing layers. This way of