SOG（spin-on-glass） | 半導体用語集 |半導体/MEMS ...
ウェブ英語表記：spin-on-glass. SOG液は、膜となるシロキサン成分と溶媒としてのアルコールなどから調整される。 この溶液をスピンコート法により基板上に塗布し、熱処理で溶媒などを蒸発させ、膜を硬化するとSOG絶縁膜が形成される。 SOGとは、これら溶液と形成される膜の総称である。 SOGは、シロキサンの構造により、シリカガラス、 …
半導体塗布絶縁材料 | ラサ工業株式会社
ウェブスピン・オン・ガラス (SOG)とは. 0.1～1μm程度のガラス膜をスピンコートで形成する材料です。 主に半導体の配線上に形成された層間絶縁膜の段差緩和や配線間の溝埋め込み（Gap Fill）に用いられます。 液体の塗布という特徴を活かして、ウエハー上のパターン凹みを容易に埋め込むことができますので、再現性良く配線の平坦化ができま …
Spin-On-Glass SoG Applications, Benefits | University Wafer
ウェブ2018年10月1日 · The planarized spin - on glass (SOG) - forms next to the first silicon oxide layer. The high selectivity of etching is crucial to remove the previous etching step and protect the metal from etching. In our work, the suction is applied to a glass layer and the CVD (silicon oxide barrier layer) is slowly etched.
ウェブHoneywell’s Accuglass® spin-on glass (SOG) mate-rials differ significantly from other spin-on materials used in IC fabrication technology such as. photoresist or polyimide. Compared to a typical photoresist, these solutions usually have much lower viscosities (1 to 3 cP), more volatile solvents and are sometimes acidic.
Spin On Glass | Stanford Nanofabrication Facility
ウェブPreferred Short Name: SOG. Chemical Formula: Various SOGs. Spin On Glass (SOG) is made up of Silicon Oxides suspended in solvents. Formulations can also include doping materials. SOGs are deposited using a spin coater. PROM requests. Request to use SOG in SNF. Spin On Glass (SOG) is made up of Silicon Oxides suspended in solvents.
Spin-on Glass (SOG) - Honeywell
ウェブSpin-on Glass (SOG) Electronic polymers with industry proven performance for metal and poly planarization, overcoat passivation, and gap fill in the manufacture of integrated circuits. They offer high thermal stability and minimal wafer thickness variation.
Polysilicon Planarization Using Spin‐On Glass - IOPscience
ウェブ1992年2月1日 · A process to planarize thick (>4000 Å) polysilicon deposited into high aspect ratio openings using spin‐on glass (SOG) as the planarizing material is described. The process uses in a commercially available batch reactive ion etching system, and has been optimized to etch polysilicon and SOG at the same rate.
ウェブThe 'spin- on-glass' films can be applied as sources of dopants for diffusion processes, and also as catalytic, sensor, dielectric, pro- tective, masking coatings or as getters or planarizing layers. This way of
Understanding of spin-on-glass (SOG) properties from their ...
ウェブ2002年8月6日 · Date of Conference: 12-13 June 1989. Date Added to IEEE Xplore: 06 August 2002. INSPEC Accession Number: Persistent Link: https://ieeexplore.ieee.org/servlet/opac?punumber=871. More » Publisher: IEEE. A summary of various types of SOG materials and their properties is presented.
Understanding of spin-on-glass (SOG) properties from their ...
ウェブ1989年6月12日 · Understanding of spin-on-glass (SOG) properties from their molecular structure. C. Chiang, D. Fraser. Published in Proceedings., Sixth…12 June 1989. Materials Science, Physics, Engineering. Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference.
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